Air-Bearing Stage
Product Overview：
High-precision air-bearing stages are devices that utilize air bearing technology to achieve frictionless and high-precision motion. By forming an extremely thin layer of air film between the platform and the base using compressed air, the platform can move with minimal friction and high stability. These platforms are widely used in precision manufacturing, optical inspection, semiconductor processing, nanotechnology, and other fields, such as metrology in semiconductor or flat-panel display manufacturing, photonics, and precision scanning.
Features：
Extremely high straightness, repeatability, and positioning accuracy.
High speed and excellent synchronization.
Highly customizable (different load capacities, travel ranges, precision requirements, electrical controls, and operating environments).
Typical Application Scenarios:
1）Photolithography Machines: Used for high-precision alignment and exposure in semiconductor manufacturing.
2）Optical Inspection Equipment: Used for precision inspection of optical components such as lenses and prisms.
3）Nanoimprint Lithography Equipment: Used for the replication and processing of nanoscale patterns.
4）Precision Measuring Instruments: Such as coordinate measuring machines (CMMs) and laser interferometers.
5）Biochip Processing: Used for high-precision fabrication and inspection of microfluidic chips.
3D Measuring Machine
Product Overview：
The 3D automatic measuring machine is designed for three-dimensional surface profile measurement of products. It integrates four advanced technologies: phase-shifting interferometry, white-light interferometry, confocal microscopy, and multi-focal plane stacking. This machine can perform a wide range of 3D measurement tasks, including surface profile measurement, coplanarity inspection, post-grinding roughness detection, particle size measurement, structural measurement, hole depth and diameter measurement, true roundness measurement, film thickness measurement, RDL circuit measurement, laser-cut groove inspection, line width and spacing measurement, copper thickness before dry film removal, SOLDER MASK opening dimensions, and copper surface roughness.
The 3D automatic measuring machine is primarily used for high-precision, rapid, and automated 3D surface profile measurement of products such as wafers and PCB boards.
Performance Specifications：
1）High Precision: 0.1 nm height resolution.
2）Ultra-Fast: 2 seconds per field of view (FOV).
3）Multi-Functionality: Confocal microscopy, interferometry, and multi-focal plane capabilities.
4）Multi-Point Programmable Measurement.
5）Automation: Automatic scanning, automatic data statistics, and automatic data upload.
6）Barcode Reading and Template Calling.
7）CCD Image Positioning: Expansion/contraction correction and placement offset correction.
8）SECS/GEM Compatibility.
3D Optical Profiler
Optical metrology technology is an extremely versatile laboratory testing tool that plays a crucial role in verifying quality and design intent. Today, thanks to its non-contact, non-destructive, rapid, highly sensitive, and exceptional resolution and accuracy, it has become a "preferred" metrology solution.
The industry's only 3D optical profiler that integrates confocal microscopy, white-light interferometry, phase-shifting interferometry, and multi-focal plane stacking.
The 3D optical profiler can precisely, quantitatively, and in compliance with ISO standards, measure surfaces and characterize micron and nano-scale surface features in a non-contact manner. It captures up to 2 million data points in just a few seconds. Applications include characterizing the topography, waviness, roughness, and microstructure of samples ranging from ultra-smooth sub-angstrom optical surfaces to highly rough and diffuse 3D-printed surfaces.
Choosing the right optical profiler system depends on your application requirements, such as speed, accuracy, vertical range, automation, and flexibility.
